Publication

Profile angle control in SIO2 deep anisotropic dry etching for MEMS fabrication

Philippe Renaud, Cyrille Hibert, Philippe Flückiger
2004
Conference Papers

Résumé

We report a recent breakthrough to control profile angle for SiO2 Deep Anisotropic Dry Etching (SDADE). Our study reveals that gas residence time is the key parameter to control profile angle. Moreover, we show that it is possible to control profile angle, SiO2 etch rate and SiO2 selectivity to Si mask independently. Finally, the optimized process has the following performances: angle profile: 89.8degrees, SiO2 etch rate: 500 nm / min, selectivity: 18:1.

Source officielle

https://infoscience.epfl.ch/entities/publication/152aaf84-f02c-49b2-8947-b9d74498c415

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Philippe Renaud, Cyrille Hibert, Philippe Flückiger
2004
Conference Papers

Résumé

Source officielle

https://infoscience.epfl.ch/entities/publication/152aaf84-f02c-49b2-8947-b9d74498c415

À propos de ce résultat

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Le gaz naturel, ou gaz fossile, est un mélange gazeux d'hydrocarbures constitué principalement de méthane, mais comprenant généralement une certaine quantité d'autres alcanes supérieurs, et parfois un faible pourcentage de dioxyde de carbone, d'azote, de sulfure d'hydrogène ou d'hélium. Naturellement présent dans certaines roches poreuses, il est extrait par forage et est utilisé comme combustible fossile ou par la carbochimie. Le méthane est généralement valorisé par le gaz de synthèse en méthanol.

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Landfill gas utilization is a process of gathering, processing, and treating the methane or another gas emitted from decomposing garbage to produce electricity, heat, fuels, and various chemical compounds. After fossil fuel and agriculture, landfill gas is the third largest human generated source of methane. Compared to , methane is 25 times more effective as a greenhouse gas. It is important not only to control its emission but, where conditions allow, use it to generate energy, thus offsetting the contribution of two major sources of greenhouse gases towards climate change.

Gas flare

A gas flare, alternatively known as a flare stack, flare boom, ground flare, or flare pit is a gas combustion device used in places such as petroleum refineries, chemical plants and natural gas processing plants, oil or gas extraction sites having oil wells, gas wells, offshore oil and gas rigs and landfills. In industrial plants, flare stacks are primarily used for burning off flammable gas released by safety valves during unplanned over-pressuring of plant equipment.

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