Publication

Fabrication of slot waveguide cavity for sensing application

Hans Peter Herzig, Qing Tan, Armando Cosentino
2010
Conference Papers

Résumé

The fabrication of a slot waveguide cavity oriented to sensing application is demonstrated. The choice of materials and the development of the process flow steps, including E-beam lithography (EBL) and metal lift-off of a single thin layer, are illustrated and discussed to obtain 30 nm width slots in a thin gold layer.

Source officielle

https://infoscience.epfl.ch/entities/publication/4854508d-c81c-4453-877e-e83a6ca0d37e

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Hans Peter Herzig, Qing Tan, Armando Cosentino
2010
Conference Papers

Résumé

Source officielle

https://infoscience.epfl.ch/entities/publication/4854508d-c81c-4453-877e-e83a6ca0d37e

À propos de ce résultat

Concepts associés (14)

Flow process chart

The flow process chart is a graphical and symbolic representation of the activities performed on the work piece during the operation in industrial engineering. The first structured method for documenting process flow, e.g., in flow shop scheduling, the flow process chart, was introduced by Frank and Lillian Gilbreth to members of ASME in 1921 as the presentation "Process Charts, First Steps in Finding the One Best Way to Do Work". The Gilbreths' tools quickly found their way into industrial engineering curricula.

Interference lithography

Interference lithography (or holographic lithography) is a technique for patterning regular arrays of fine features, without the use of complex optical systems or photomasks. The basic principle is the same as in interferometry or holography. An interference pattern between two or more coherent light waves is set up and recorded in a recording layer (photoresist). This interference pattern consists of a periodic series of fringes representing intensity minima and maxima.

Control-flow diagram

A control-flow diagram (CFD) is a diagram to describe the control flow of a business process, process or review. Control-flow diagrams were developed in the 1950s, and are widely used in multiple engineering disciplines. They are one of the classic business process modeling methodologies, along with flow charts, drakon-charts, data flow diagrams, functional flow block diagram, Gantt charts, PERT diagrams, and IDEF. A control-flow diagram can consist of a subdivision to show sequential steps, with if-then-else conditions, repetition, and/or case conditions.

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