Integrating Bio-sensing Functions on CMOS Chips

The paper discusses the recent achievements in the development of chips with integrated sensing of biomolecules. In particular, it focuses on integrated sensing electrodes on silicon and presents innovative solutions for the enhanced robustness of the electrodes towards cleaning processes and electrolytes. In this study, a microfabrication technology for 3D-integrated disposable chip layers to enable the reusability of the overall system for many times is presented.