9 MHz vibrating body FET tuning fork oscillator

A 9.4MHz micro-electromechanical oscillator based on a Vibrating Body Field Effect Transistor (VB-FET) is presented in this work. The tuning fork VB-FET used in this work provides a high quality factor of 9400 in the open-loop configuration and a low equivalent resistance. This performance makes the VB-FET an interesting candidate for fully integrated oscillator. An oscillator based on the tuning fork VB-FET is characterized.