Publications associées à Two-dimensional cantilever array with varying spring constants and tip radii for life-science applications

Silicon microresonator arrays: A comprehensive study on fabrication techniques and pH-controlled stress-induced variations in cantilever stiffness

Luis Guillermo Villanueva Torrijo, Annalisa De Pastina

We introduce a detailed design and fabrication process of Silicon microcantilever arrays for biomolecular detection in liquid environment, utilized with laser readout. We present typical fabrication problems and provide related solutions to obtain high qua ...

Elsevier2024

Lithium tantalate photonic integrated circuits for volume manufacturing

Tobias Kippenberg, Kai Huang, Chen Yang, Mikhail Churaev, Xinru Ji, Yang Chen, Zihan Li, Alisa Davydova, Xi Wang, Junyin Zhang

Electro-optical photonic integrated circuits (PICs) based on lithium niobate (LiNbO3) have demonstrated the vast capabilities of materials with a high Pockels coefficient1,2. They enable linear and high-speed modulators operating at complementary metal–oxi ...

2024

3D printed fiber-optic nanomechanical bioprobe

Sandor Kasas, Yuguang Chen, Jiangtao Zhou, Yiping Wang

Ultrasensitive nanomechanical instruments, e.g. atomic force microscopy (AFM), can be used to perform delicate biomechanical measurements and reveal the complex mechanical environment of biological processes. However, these instruments are limited because ...

IOP Publishing Ltd2023

Learning Dynamics of Spring-Mass Models with Physics-Informed Graph Neural Networks

Manav Manav, Olga Fink, Vinay Sharma

We propose a physics-informed message-passing graph neural network (GNN) for learning the dynamics of springmass systems. The proposed method embeds the underlying physics directly into the message-passing scheme of the GNN. We compare the new scheme with ...

Research Publishing2023

Dynamic control of high-voltage actuator arrays by light-pattern projection on photoconductive switches

Herbert Shea, Amir Firouzeh, Vesna Bacheva, Edouard Franck Vincent Gustave Leroy, Aiste Balciunaite

The ability to control high-voltage actuator arrays relies, to date, on expensive microelectronic processes or on individual wiring of each actuator to a single off-chip high-voltage switch. Here we present an alternative approach that uses on-chip photoco ...

SPRINGERNATURE2023

Fab-to-fab and run-to-run variability in 130 nm and 65 nm CMOS technologies exposed to ultra-high TID

Jean-Michel Sallese, Adil Koukab, Stefano Michelis, Gennaro Termo

The discovery of a large fab-to-fab variability in the TID response of the CMOS technologies used in the design of ASICs for the particle detectors of the HL-LHC triggered a monitoring effort to verify the consistency of the CMOS production process over ti ...

IOP Publishing Ltd2023

Silicon spin qubits from laboratory to industry

Edoardo Charbon, Louis Hutin

Quantum computation (QC) is one of the most challenging quantum technologies that promise to revolutionize data computation in the long-term by outperforming the classical supercomputers in specific applications. Errors will hamper this quantum revolution ...

IOP Publishing Ltd2023

Light-Driven Thermo-Optical Effects in Nanoresonator Arrays

Giulia Tagliabue, Alfredo Angelo Luigi Naef, Ershad Mohammadi, Theodoros Tsoulos

Thermonanophotonics, that is the study of photothermal effects in optical nanoantennas, has recently attracted growing interest. In particular, going beyond thermoplasmonic designs, thermo-optical modulation of dielectric nanoantennas opens new opportuniti ...

WILEY-V C H VERLAG GMBH2023

A new versatile hybrid MEMS technology for high sensitivity, fluid proof sensing applications

Matthias Neuenschwander

The field of micro electromechanical systems (MEMS) evolved from the microelectronic industry and the technologies developed to fabricate integrated circuits. As a result, MEMS are commonly fabricated on silicon wafers. The development of MEMS has been dri ...

EPFL2022

Scalable fabrication of functional nanostructures on stretchable substrates by capillary-assisted particle assembly and adhesion lithography

Henry Shao-Chi Yu

The fabrication of metallic nanostructures on stretchable substrates enables specific applications that exploit the combination of the nano-scale phenomena and the mechanical tunability of the physical dimensions of the nanostructures. Due to the large dif ...

EPFL2022

Ultra low quantum decoherence nano-optomechanical systems

Mohammadjafar Bereyhi

Thermal motion of a room-temperature mechanical resonator typically dominates the quantum backaction of its position measurement. This is a longstanding barrier for exploring cavity optomechanics at room temperature. In order to enter the quantum regime of ...

EPFL2022

In Situ Reflectometry and Diffraction Investigation of the Multiscale Structure of p-Type Polysilicon Passivating Contacts for c-Si Solar Cells

Christophe Ballif, Franz-Josef Haug, Andrea Ingenito, Audrey Marie Isabelle Morisset

The integration of passivating contacts based on a highly doped polycrystalline silicon (poly-Si) layer on top of a thin silicon oxide (SiOx) layer has been identified as the next step to further increase the conversion efficiency of current mainstream cry ...

AMER CHEMICAL SOC2022

Strong Subconvexity for Self-Dual GL(3) L-Functions

Yongxiao Lin, Ramon Moreira Nunes, Zhi Qi

In this paper, we prove strong subconvexity bounds for self-dual GL(3) L-functions in the t-aspect and for GL(3) x GL(2) L-functions in the GL(2)-spectral aspect. The bounds are strong in the sense that they are the natural limit of the moment method pione ...

OXFORD UNIV PRESS2022

Characterization and Development of Fired Passivating Contacts for Silicon Solar Cells

Mario Joe Lehmann

One of the key elements to improve mainstream crystalline silicon (c-Si) solar cell performance is surface passivation, which is at the center of the ongoing transition from cells with direct silicon-metal contacts to full area passivating contacts. In the ...

EPFL2022

Nanoscale Study of the Hole-Selective Passivating Contacts with High Thermal Budget Using C-AFM Tomography

Christophe Ballif, Quentin Thomas Jeangros, Franz-Josef Haug, Gizem Nogay, Martin Ledinsky, Philipp Friedrich Hermann Löper

We investigate hole-selective passivating contacts that consist of an interfacial layer of silicon oxide (SiOx) and a layer of boron-doped SiCx(p). The fabrication process of these contacts involves an annealing step at temperatures above 750 degrees C whi ...

AMER CHEMICAL SOC2021

Optimized electrochemical breakdown etching using temporal voltage variation for formation of nanopores in a silicon membrane

Miao Zhang

Dielectric breakdown etching is a well-known method of making nanopores on thin (similar to 50 nm) dielectric membranes. However, voltage driven translocation of biomolecules through such nanopores becomes extremely fast. For improved detection, for instan ...

ELSEVIER SCIENCE SA2021

Fabrication of zipping electrostatic actuators incorporating inkjet-printed layers

Samuel Rosset, Herbert Shea, Giulio Grasso

Zipping electrostatic actuators operate by bending flexible electrodes using electrostatic forces. This principle allows the use of a wide range of dielectric and conductive materials. Additive Manufacturing (AM) techniques can be used to fabricate these a ...

SPIE-INT SOC OPTICAL ENGINEERING2021

Fabrication of Single-Crystalline InSb-on-Insulator by Rapid Melt Growth

Anna Fontcuberta i Morral, Nicholas Paul Morgan, Heera Menon

InSb has the smallest bandgap and highest electron mobility among III-V semiconductors and is widely used for photodetectors and high-frequency electronic applications. Integration of InSb directly on Si would drastically reduce the fabrication cost and en ...

Wiley2021

Wafer-Level Vacuum Sealing for Packaging of Silicon Photonic MEMS

Niels Quack, Göran Stemme, Hamed Sattari, Alain Yuji Takabayashi

Silicon (Si) photonic micro-electro-mechanical systems (MEMS), with its low-power phase shifters and tunable couplers, is emerging as a promising technology for large-scale reconfigurable photonics with potential applications for example in photonic accele ...

SPIE-INT SOC OPTICAL ENGINEERING2021

Visualizing intracellular nanostructures of living cells by nanoendoscopy-AFM

Marcos Penedo Garcia

Atomic force microscopy (AFM) is the only technique that allows label-free imaging of nanoscale biomolecular dynamics, playing a crucial role in solving biological questions that cannot be addressed by other major bioimaging tools (fluorescence or electron ...

AMER ASSOC ADVANCEMENT SCIENCE2021