Formulation and processing of screen-printing vehicles for sacrificial layers on thick-film and LTCC substrates

Ceramic technologies such as thick-film and LTCC (Low Temperature Cofired Ceramic) are excellent platforms for the fabrication of mesoscale devices such as sensors, actuators, microreactors and MEMS packaging. This work presents two alternative screen-printing vehicles for the processing of sacrificial materials and low-firing thick films: 1) a non-aggressive glycol-based vehicle for screen printing thick sacrificial layers onto thin LTCC, and 2) a "high non-evaporables" vehicle for mineral / carbon sacrificial materials allowing subsequent overprinting in the dried state. Their formulation, processing and applications are discussed with regard to the physical and chemical properties of the solvents, plasticisers and binders.