Low Temperature p-type Microcrystalline Silicon as Carrier Selective Contact for Silicon Heterojunction Solar Cells

Silicon heterojunction (SHJ) solar cells have reached record efficiency, particularly in all-back-contacted architectures. Despite this, two-side contacted SHJ cells still suffer from parasitic absorption and series resistance losses in the amorphous silicon contacts. An alternative to the doped amorphous silicon layer is microcrystalline silicon, which exhibits improved transparency and charge transport while maintaining the superior passivation quality of all-silicon contact stacks. However, depositing thin, highly crystalline films has remained a challenge until recently. In this work, we use deposition temperatures