Publication

Fabrication Of Lithium Niobate Bulk Acoustic Resonator For 5G Filters

Luis Guillermo Villanueva Torrijo, Annalisa De Pastina, Soumya Yandrapalli, Victor Plessky, Muhammad Faizan
2019
Conference Papers

Résumé

This work presents the fabrication of a MEMS resonant device which addresses the need for high quality and miniaturized RF filters in the 3-6 GHz range for 5th generation (5G) mobile networks. The 4-mask fabrication process is based on the definition of interdigitated Aluminum (Al) electrodes on a suspended membrane of 400 nm-thick Z-cut lithium niobate (LiNbO3). Devices are fabricated with a yield of 70% and exhibit high electromechanical coupling (k(t)(2)) and quality factor (Q) up to 28% and 300, respectively, for frequencies around 5 GHz.

Source officielle

https://infoscience.epfl.ch/entities/publication/ee6418f7-9c75-466b-ad1d-66dd66e3f25d

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Luis Guillermo Villanueva Torrijo, Annalisa De Pastina, Soumya Yandrapalli, Victor Plessky, Muhammad Faizan
2019
Conference Papers

Résumé

Source officielle

https://infoscience.epfl.ch/entities/publication/ee6418f7-9c75-466b-ad1d-66dd66e3f25d

À propos de ce résultat

Concepts associés (21)

Quality (business)

In business, engineering, and manufacturing, quality – or high quality – has a pragmatic interpretation as the non-inferiority or superiority of something (goods or services); it is also defined as being suitable for the intended purpose (fitness for purpose) while satisfying customer expectations. Quality is a perceptual, conditional, and somewhat subjective attribute and may be understood differently by different people. Consumers may focus on the specification quality of a product/service, or how it compares to competitors in the marketplace.

Management de la qualité

vignette|La roue de Deming illustre le processus d'amélioration continue, l'un des principes fondamentaux du management de la qualité. Le management de la qualité, ou gestion de la qualité, est une discipline du management regroupant l'ensemble des concepts et méthodes visant à satisfaire les clients d'un organisme (en général les entreprises, associations, organismes publics) et à fournir des produits et services correspondant à leurs attentes.

Filtre mécanique

A mechanical filter is a signal processing filter usually used in place of an electronic filter at radio frequencies. Its purpose is the same as that of a normal electronic filter: to pass a range of signal frequencies, but to block others. The filter acts on mechanical vibrations which are the analogue of the electrical signal. At the input and output of the filter, transducers convert the electrical signal into, and then back from, these mechanical vibrations.

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Publications associées (29)

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Mechanical resonators are widely used in sensors, transducers and optomechanical systems, where mechanical dissipation sets the ultimate limit to performance. Over the past 15 years, the quality factors in strained mechanical resonators have increased by f ...

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Room-temperature quantum optomechanics using an ultralow noise cavity

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At room temperature, mechanical motion driven by the quantum backaction of light has been observed only in pioneering experiments in which an optical restoring force controls the oscillator stiffness1,2. For solid-state mechanical resonators in which oscil ...

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Extensions of Peer Prediction Incentive Mechanisms

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As large, data-driven artificial intelligence models become ubiquitous, guaranteeing high data quality is imperative for constructing models. Crowdsourcing, community sensing, and data filtering have long been the standard approaches to guaranteeing or imp ...

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