Concept

MEMS

Related lectures (32)

Covers advanced topics in MEMS technology, including design, packaging, device categories, historical perspective, market trends, and the role of startups.

Fabrication extended: Etching

Covers the process of etching using wet and dry techniques, explaining definitions, steps, examples, challenges, and solutions.

Dry Etching Techniques

Explores dry etching techniques for different materials, including continuous, pulsed, cryogenic processes, and isotropic etching using SF6.

Dry Etching: Techniques and Equipment

Explores various dry etching techniques for silicon and the equipment used in the process, including RF plasma sources and HF vapor phase etchers.

MEMS and Cleanroom Inspection

Explores MEMS inspection and metrology techniques in cleanroom environments for validating device functionality and meeting design specifications.

Etch Stop Techniques

Explores etch stop techniques, including B implantation, electrochemical etch stops, and bulk micromachining examples in micro and nanofabrication.

Electrostatics in MEMS: Scaling Laws & Applications

Explores scaling laws and applications of electrostatics in MEMS, covering topics like parallel plate capacitors, zipping actuators, and MEMS gyroscopes.

Deep Reactive Ion Etching: High Aspect Ratio Structures

Explores deep reactive ion etching for high aspect ratio structures and the Bosch process.

Wet Etching: Thin Films and Microfabrication

Explores wet etching processes, including anisotropic and isotropic etching, thin membrane microfabrication, and applications in microfabrication.

Low Power Sensor Technology for IoT and Wearables

Covers low power sensor technology for IoT and wearables, focusing on activity sensors based on MEMS and biosignals.

Microfabrication Technologies

Explores microfabrication technologies, lithography, MEMS, cleanroom processes, resolution enhancement, phase shift masks, and chip manufacturing complexity.

Nanoscale MEMS: Fabrication, Tips, and Microscopy

Covers the fabrication of nanoscale MEMS devices and the operation of the Atomic Force Microscope for measuring ultrasmall forces on particles.

Introduction to Advanced MEMS

Introduces the practical aspects of the Advanced MEMS course and explores MEMS technology, trends, sensors, actuators, and more.

Electrostatic MEMS: DEA and Comb Drives

Explores DEA, Comb Drives, Electro-Adhesion, Zipping actuators, and MEMS applications.

Piezoresistive MEMS Sensors: Working Principles and Applications

Explores the working principles and applications of piezoresistive MEMS sensors in various industries.

Capacitive MEMS Sensors: Working Principles

Explains the working principles of capacitive MEMS sensors, differential capacitors, MEMS microphones, and the impact of MEMS technology on consumer products.

Finite Element Modeling: Introduction to Scaling Laws

Covers Finite Element Modeling basics for microsystems, focusing on scaling laws and simulations using COMSOL.

MEMS Products: Accelerometer

Explores successful MEMS products like accelerometers and their fabrication process, as well as their application in car airbags and smartphones.

Advanced MEMS and Microsystems: Interactive Session Instructions

Covers the schedule and content of the Advanced MEMS and Microsystems course.

Dry Etching of Organic and Metal Films

Explores anisotropic etching of organic films and Al alloys, emphasizing the role of Al2O3 in Al etching and presenting examples of dry etching processes.