Concept

MEMS

Related lectures (32)

MEMS and Cleanroom: Fabrication Technologies

Discusses fabrication technologies in MEMS and cleanroom environments and emphasizes the importance of cleanrooms in preventing contamination.

Micro/Nanomechanical Devices: Scaling Laws and MEMS Applications

Covers scaling laws in micro/nanomechanical devices and explores diverse MEMS applications.

Silicon Etching Techniques

Explores silicon etching techniques, fabrication of the Utah array, impedance measurements, and active silicon probes for neural recordings.

Micro and Nanofabrication

Covers micro and nanofabrication processes, including plasma etching and dry etching techniques.

Micro-Electro-Mechanical Systems

Covers the introduction to Micro-Electro-Mechanical Systems (MEMS), including operating principles, elements, scaling laws, silicon choice, sensors, and actuators.

Micromachining Technology: Safety Concepts and Applications

Explores micromachining technology for weapon systems, focusing on safety concepts and stress control in PolySi layers.

Glass Microfabrication by Wet Etching

Explores glass microfabrication using wet etching with hydrofluoric acid, covering etching mechanisms, additives impact, and surface effects.

Sensors Technologies Comparison

Explores sensor technologies in MEMS, focusing on pressure sensors, accelerometers, and gyroscopes, and highlights the significance of sensor fusion.

Wet Etching: Crystal Structure and Anisotropy

Explores silicon crystal structure, anisotropy in etching rates, etch mechanisms, and different etching baths in micro and nanofabrication.

Actuators and Optical MEMS

Explores actuators, optical MEMS, micromirrors, and advanced MEMS systems for mobile and consumer electronics.

Micro-ElectroMechanical Systems (MEMS)

Explores Micro-ElectroMechanical Systems (MEMS) development, ion channels, patch clamp technique, drug discovery, and PDMS integration in microfluidic systems.

Microsystems for Bioseparation

Explores bioseparation methodologies, essential for biological processing, including capillary electrophoresis and microchip chromatography.