Explores lithography in microfabrication technologies, covering thin film deposition, print resolution, process flow, and limitations imposed by diffraction.
Explores interferometers' applications, lithography techniques, and nanostructure creation using interference lithography and EUV interference lithography.
Explores stencil lithography, a high-resolution direct patterning technique, and its applications on flexible substrates, dynamic stenciling, and biopatterning.
