Explores MEMS resonators and oscillators, CMOS integration, frequency stability, temperature drift compensation, resonator packaging, and advanced resonator structures.
Covers the applications and mechanisms of pyroelectric detectors, including their structure, motion detection, and comparison with other thermal detectors.
Covers the introduction to Micro-Electro-Mechanical Systems (MEMS), including operating principles, elements, scaling laws, silicon choice, sensors, and actuators.
Explores quantum limits on measurement and control, including interferometric position measurement, noise in displacement measurement, and membrane force sensing.
