Concept

Plasma etching

Related lectures (32)

Covers the process of etching using wet and dry techniques, explaining definitions, steps, examples, challenges, and solutions.

Industrial Plasmas: Sheath Formation and Plasma Etching

Explores sheath formation, plasma etching, ion velocity, and energy in industrial plasmas, emphasizing their significance for modern electronics manufacturing.

Plasma Physics: Sheaths and Etching

Explores plasma formation, sheath creation, and plasma etching applications for integrated circuit manufacturing.

Industrial Plasmas: Applications and Chemistry

Explores industrial plasma applications, breakdown phenomena, and plasma chemistry challenges, including gas-phase reactions and transport processes.

Dry Etching Techniques

Explores dry etching techniques for different materials, including continuous, pulsed, cryogenic processes, and isotropic etching using SF6.

Plasma Applications: Industry & Medicine

Surveys plasmas in industry and medicine, emphasizing industrial applications and plasma medicine uses.

Glass Microfabrication by Wet Etching

Explores glass microfabrication using wet etching with hydrofluoric acid, covering etching mechanisms, additives impact, and surface effects.

Dry Etching of Organic and Metal Films

Explores anisotropic etching of organic films and Al alloys, emphasizing the role of Al2O3 in Al etching and presenting examples of dry etching processes.

Dry etching: fundamentals and applications

Explores the fundamentals of dry etching in a gas plasma and provides simple rules for choosing dry etchants.

Micro and Nanofabrication

Covers micro and nanofabrication processes, including plasma etching and dry etching techniques.

Dry Etching Techniques

Explores dry etching techniques in semiconductor processing, from barrel reactors to modern plasma sources like ICP and ECR.

Industrial Plasmas: Applications and Challenges

Explores industrial plasma applications, challenges, and key principles governing plasma behavior in various industries.

Dry Etching: Techniques and Equipment

Explores various dry etching techniques for silicon and the equipment used in the process, including RF plasma sources and HF vapor phase etchers.

Silicon Etching Techniques

Explores silicon etching techniques, fabrication of the Utah array, impedance measurements, and active silicon probes for neural recordings.

Basic Industrial Plasmas

Covers the basics of industrial plasmas, from chemistry to applications in micro-electronics.

Deep Reactive Ion Etching: High Aspect Ratio Structures

Explores deep reactive ion etching for high aspect ratio structures and the Bosch process.

Industrial Plasmas: Sheath Formation and Plasma Etching

Explores sheath formation, plasma etching, AC plasma processing, and ozone production.

Plasma Generation and Ion Sheath in Etching

Explores plasma generation, ion sheath, DC bias voltage, and electrode design in micro and nanofabrication processes.

Plasma Heating: Neutral Beams

Explores the limitations of ohmic heating in plasma and the advantages and drawbacks of neutral beam injection for additional plasma heating.

Micro and Nanofabrication: Chemical Reactions and Etching Processes

Explores chemical reactions and etching processes in micro and nanofabrication, including Si etching and the formation of porous Si.