ME-426: Micro/Nanomechanical devices

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Lectures in this course (14)

Micro/Nanomechanical Devices: Fabrication Techniques

Explores the fabrication of micro/nanomechanical devices, covering release, selectivity, stiction, deposition, etching, lithography, and growth techniques.

Untitled

Transduction of the Motion

Explores transduction in N/MEMS, covering force-based and deformation-based methods.

Untitled

Transduction of Motion: Optical Lever and Interferometer Detection

Explores optical lever and interferometer detection methods for motion transduction in microscale devices.

Force Detection: Basics and Structures

Covers force detection basics, structures, and mathematical models for detecting forces effectively.

Force Detection: Nonlinear Effects and Composite Beams

Explores force detection in beams, including nonlinear effects, built-in tension, and composite beams.

Surface Stress Detection: Multi-layer Structures

Explores surface stress detection in multi-layer structures and elastic constants in single-layer structures.

Resonators: Understanding Frequency Response and Eigenvalues

Covers resonators, Eigenvalue problem for flexural resonators, and normalization importance.

Resonators: Eigenvalue Problem and Single Mode Solutions

Explores resonators' equation of motion, stress effect on frequency, and single mode solutions.

Resonators: Coupling and Nonlinearity

Explores resonator coupling, eigenvalues, and nonlinearity origins, including built-in tension effects.

Parametric Drive: Resonators

Explores parametric drive in resonators and the influence of surface effects on thin layers.

Quality Factor in Resonators

Explores the concept of quality factor in resonators, discussing its efficiency and interaction with the external environment.

Noise and Measurements

Explores electronic, thermomechanical, and amplifier noise, calibration of amplitude, frequency tracking, and system limits.

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