Lectures in course MICRO-621: MOOC: Micro and Nanofabrication (MEMS)

MEMS Products: Accelerometer

Explores successful MEMS products like accelerometers and their fabrication process, as well as their application in car airbags and smartphones.

Microphones in Smartphones

Covers the design and fabrication of MEMS microphones used in smartphones.

Bulk Acoustic Wave Resonators in MEMS

Explores the design and fabrication of Bulk Acoustic Wave resonators for smartphone applications in RF front-end modules.

Thermo-mechanical Micro-actuator: Case Study

Explores the design and fabrication of a bi-morph micro-actuator and its thermo-mechanical characterization through DC and AC current applications.

Cleanroom Basics: Introduction to Contamination Issues

Explores cleanroom basics and contamination issues in microfabrication processes, emphasizing the impact of contaminants on device performance and reliability.

Cleanroom Basics: Cleanroom Strategy

Covers methods for achieving high air purity in cleanroom environments for microfabrication processes.

Chemical Vapour Deposition Basics

Introduces the basics of Chemical Vapour Deposition, covering gas flow, pressure, and film growth kinetics.

Chemical Vapor Deposition: Processes and Applications

Explores various Chemical Vapor Deposition processes, including APCVD, SACVD, LPCVD, UHV/CVD, PECVD, and MOCVD, focusing on film growth and plasma effects.

Chemical Vapour Deposition: Thin Films & Oxidation

Explores Chemical Vapour Deposition, thermal oxidation, and a micro-actuator case study in micro and nanofabrication.

CVD: Theoretical Concepts and Boundary Layers

Explores theoretical concepts in CVD, focusing on boundary layers and the Reynolds number.

Gas Transport and Film Growth Rate

Covers mass transport in the boundary layer, gas transfer to the substrate, film growth rate calculation, and experimental results.

Chemical Vapor Deposition: Si, SiN4, SiO2, Diamond

Explores LPCVD and PECVD processes for Si, SiN4, SiO2, and diamond in microelectronics applications.

Chemical Vapor Deposition: Oxide Formation and ALD

Explores CVD processes for oxide formation and ALD in micro and nanofabrication.

Physical Vapor Deposition: Basics and Applications

Explores Physical Vapor Deposition techniques, including vapor creation and flux towards the substrate in micro and nanofabrication.

Sputtering in CMi

Covers the operation of a cluster sputtering tool and the process of changing sputter targets.

PVD 7: Other Techniques

Explores ion plating, MBE, and PLD techniques in thin film fabrication.

Thin Film Growth: Atoms Arrival and Adhesion

Delves into thin film growth, adhesion, crystal structure, and stresses.

Stress in Thin Films: Film Growth and Microfabrication

Examines stress in thin films, including uniform distribution and intrinsic factors, within the context of microfabrication.

Film Growth: Growth Modes and Crystal Structure

Explores growth modes in film growth and crystal structure determination based on materials used.

Physical Vapor Deposition: Evaporation Techniques

Explores Physical Vapor Deposition techniques, including shadowing effects and equipment specifications for evaporation processes in micro and nanofabrication.