MICRO-621: MOOC: Micro and Nanofabrication (MEMS)

About
Privacy
Disclaimer

Graph Chatbot

Lectures in this course (64)

Thermal Evaporation Process

Explains the thermal evaporation process in a vacuum chamber for micro-nano fabrication.

Sputtering: Plasma Formation and Thin Film Deposition

Covers sputtering, plasma creation, and thin film deposition processes.

PVD 3: Sputtering and Paschen's Law

Explores spatial zones in glow discharge and Paschen's law.

Sputtering Techniques: PVD4, DC, RF

Explores DC, RF, and Magnetron sputtering techniques in Micro and Nanofabrication.

Sputtering: Ion Target Interactions

Examines ion-target interactions in PVD sputtering processes, covering compound deposition, surface damage, and factors influencing target ejection rates.

Sputtering: Film Growth and Control Parameters

Covers the sputtering process, parameters influencing film quality, and advantages over thermal evaporation.

Transparent Conductive Oxide: Sputtering

Explores sputtering principles for transparent conductive oxide in solar cells and the use of piezoelectric materials for sensors and filters.

Lithography: General Concepts and Mask Fabrication

Covers lithography concepts, mask fabrication, UV lithography, and emerging techniques.

Electron Beam Lithography: Tool Overview

Explores electron beam lithography, covering electron gun brightness, lens aberrations, beam diameter, and tool implementation.

Design Preparation and Fracture: Electron Beam Lithography

Explores design preparation, fracture, and electron beam lithography processes in nanofabrication.

Electron Beam Lithography: Interactions and Resist Contrast

Explores electron-sample interactions and resist contrast in lithography for high-resolution fabrication.

Lithography: Electron Beam Lithography and Resists

Explores electron beam lithography using PMMA and HSQ resists, multi-layer processes, and alignment techniques.

Electron Beam Lithography: Proximity Effect Corrections

Explores proximity effect corrections in electron beam lithography for small and large features, emphasizing the importance of beam point spread function modeling.

Lithography: Scanning Probe Lithography

Delves into scanning probe lithography, exploring its principles and potential applications in nano-fabrication.

Lithography: Alternative Patterning Methods

Explores alternative lithography methods like nanoimprint and stencil lithography for nanowire fabrication and exotic surface patterning.

Lithography: Resist Properties and Exposure Methods

Covers lithography concepts, resist properties, exposure methods, and pattern transfer techniques.

Lithography: Photoresist Sensitivity and Modulation Transfer Function

Discusses photoresist properties in lithography resolution and the role of the optical transfer function.

Lithography: Mask and Laser Writing

Explores photomask creation, exposure methods, direct laser writing, resolution, and resist development in MEMS applications.

Clip Mask Fabrication

Showcases the practical steps of fabricating a mask for UV lithography.

Lithography: Tools and Techniques

Covers the principles and tools used in lithography for micro and nanofabrication.

Page 2 of 4