Course

MICRO-621: MOOC: Micro and Nanofabrication (MEMS)

Lectures in this course (64)

Covers UV lithography using a clip mask aligner for micro and nanofabrication.

Electron Beam Lithography: Tool Overview

Explores Electron Beam Lithography (EBL), its tool overview, vacuum levels, electron sources, and guns for sub-20 nm feature fabrication.

Electron Beam Lithography: II Electron Optics and Beam Deflection

Covers electron beam control, focusing, lens types, and writing strategies.

Dry etching: fundamentals and applications

Explores the fundamentals of dry etching in a gas plasma and provides simple rules for choosing dry etchants.

Dry Etching: Techniques and Equipment

Explores various dry etching techniques for silicon and the equipment used in the process, including RF plasma sources and HF vapor phase etchers.

Plasma Generation and Ion Sheath in Etching

Explores plasma generation, ion sheath, DC bias voltage, and electrode design in micro and nanofabrication processes.

Dry Etching Techniques

Explores dry etching techniques in semiconductor processing, from barrel reactors to modern plasma sources like ICP and ECR.

Ion Beam Etching

Introduces ion beam etchers, combining physical sputtering with chemical activity.

Dry Etching Techniques

Explores dry etching techniques for different materials, including continuous, pulsed, cryogenic processes, and isotropic etching using SF6.

Dry Etching of Organic and Metal Films

Explores anisotropic etching of organic films and Al alloys, emphasizing the role of Al2O3 in Al etching and presenting examples of dry etching processes.

Wet Etching: Thin Films and Microfabrication

Explores wet etching processes, including anisotropic and isotropic etching, thin membrane microfabrication, and applications in microfabrication.

Wet Etching: Glass and Silicon

Explores the wet etching process of glass and silicon using HF-based solutions and cleanroom processes for HF and BHF etchants.

Wet Etching: Chemical Reactions and Process Optimization

Explores the chemical reactions and optimization of isotropic wet etching in Si.

Wet Etching: Crystal Structure and Anisotropy

Explores silicon crystal structure, anisotropy in etching rates, etch mechanisms, and different etching baths in micro and nanofabrication.

Etch Stop Techniques

Explores etch stop techniques, including B implantation, electrochemical etch stops, and bulk micromachining examples in micro and nanofabrication.

Wet Etching: Sacrificial Layers

Covers wet etching of sacrificial layers in micro and nanofabrication, including challenges and solutions for microstructure deformation and stress diagnosis.

Micro and Nanofabrication: Inspection and Metrology

Explores optical microscopy variations for inspection and dimension measurement in Micro and Nanofabrication processes.

Inspection and Metrology: Thin Film Measurement Techniques

Explores thin film measurement techniques in micro and nanofabrication processes, comparing reflectometry and ellipsometry for accuracy and methodology.

Surface Profiling Techniques

Explores surface profiling techniques like white light interferometry and laser beam profiling, emphasizing their non-contact nature and high resolution.

Mechanical Surface Profiling: AFM Applications

Explores mechanical surface profiling and AFM applications for high-resolution surface characterization.