Course

MICRO-621: MOOC: Micro and Nanofabrication (MEMS)

Lectures in this course (64)

Inspection and Metrology: Electron Microscopy

Explores the principles and applications of scanning electron microscopy in micro and nanofabrication, covering electron signals, charging issues, and dimensional measurements.

Microfabrication Techniques: Inspection and Metrology

Explores microfabrication techniques for inspection and metrology in MEMS applications.

Inspection and Metrology: Electrical Characterization of Thin Films

Explores the evaluation of thin film quality and resistance using metrology techniques.

Micro and Nanofabrication: Basics and Techniques

Covers the basics of micro and nano fabrication techniques for MEMS devices.