Publications by Philippe Flückiger

Bow-tie optical antenna probes for single-emitter scanning near-field optical microscopy

A method for the fabrication of bow-tie optical antennas at the apex of pyramidal Si3N4 atomic force microscopy tips is described. We demonstrate that these novel optical probes are capable of sub-wavelength imaging of single quantum dots at room temperatu ...

2007

RF MEMS switches for mobile communications : from metal-metal to suspended-gate MOS device architectures

Raphaël Fritschi, Vincent Pott, Philippe Flückiger, Mihai Adrian Ionescu, Cyrille Hibert, Nicolas Abelé

2005

Fabrication of vertical digital silicon optical micromirrors on suspended electrode for guided-wave optical switching applications

Philippe Renaud, Philippe Flückiger, Cyrille Hibert, Roland Guerre

This paper presents a novel technological and design study of optical guided- wave MicroElectroMechanical Systems (MEMS) switch. We work on a concept of hermetic assembly in which a MEMS wafer is covered (top-down) by a crossing optical waveguide wafer. Th ...

2005

Profile angle control in SIO2 deep anisotropic dry etching for MEMS fabrication

Philippe Renaud, Philippe Flückiger, Cyrille Hibert

We report a recent breakthrough to control profile angle for SiO2 Deep Anisotropic Dry Etching (SDADE). Our study reveals that gas residence time is the key parameter to control profile angle. Moreover, we show that it is possible to control profile angle, ...

2004

Fabrication process and model for a MEMS parallel-plate capacitor above CPW line

Anja Skrivervik, Jean-François Zürcher, Raphaël Fritschi, Philippe Flückiger, Julien Perruisseau-Carrier, Mihai Adrian Ionescu, Cyrille Hibert, Pedro Crespo Valero

2004

High tuning range AlSi RF MEMS capacitors fabricated with sacrificial amorphous silicon surface micromachining

Michel Declercq, Philippe Renaud, Catherine Dehollain, Raphaël Fritschi, Philippe Flückiger, Mihai Adrian Ionescu, Cyrille Hibert, Florin Udrea, Dimitrios Tsamados

This paper reports the fabrication and electrical characterization of high tuning range AlSi RF MEMS capacitors. We present experimental results obtained by a surface micromachining process that uses dry etching of sacrificial amorphous silicon to release ...

2004

3-D integrable optoelectronic devices for telecommunications ICs

Michel Declercq, Philippe Robert, Luc Thévenaz, Philippe Renaud, Philippe Flückiger, Mihai Adrian Ionescu, Georges-André Racine, Cyrille Hibert

The design, fabrication and characterization of CMOS-compatible optoelectronic devices is discussed. All devices are fabricated on silicon on insulator (SOI) substrates which makes them suitable for three-dimensional (3-D) telecommunication photonic integr ...

2002

A novel CMOS SOI unbalanced Mach-Zehnder interferometer: from design and simulations to fabrication and characterization

Michel Declercq, Philippe Robert, Luc Thévenaz, Philippe Renaud, Philippe Flückiger, Mihai Adrian Ionescu, Georges-André Racine, Cyrille Hibert

This paper reports on a novel, simple yet reliable, unbalanced SOI Mach-Zehnder (M-Z) interferometer architecture based on 1.2 μm CMOS process and adapted post-processing for the waveguide sidewalls. The fabricated electro-optical device is based on multip ...

2001