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Thomas Kiefer

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Related publications (15)

Please note that this is not a complete list of this person’s publications. It includes only semantically relevant works. For a full list, please refer to Infoscience.

Direct imprinting of organic-inorganic hybrid materials into high aspect ratio sub-100 nm structures

Jürgen Brugger, Thomas Kiefer, Victor Javier Cadarso Busto, Vaida Auzelyte

The challenging fabrication of sub-100-nm structures with high aspect ratio by UV-nanoimprint lithography (NIL) is addressed in this work. Thermal shrinkage is induced by cooling the structures below room temperature to avoid the issues commonly arising du ...

Springer Verlag2014

Highly ordered palladium nanodot patterns for full concentration range hydrogen sensing

Jürgen Brugger, Thomas Kiefer, Luis Guillermo Villanueva Torrijo

A hydrogen sensor based on a novel fabrication process that combines the precision of advanced nano-fabrication techniques with a bottom-up process based on electrochemistry is presented. The sensor allows for reliable detection between 0.1% and 100% of H2 ...

2012

Sub micrometer ceramic structures fabricated by molding a polymer-derived ceramic

Jürgen Brugger, Raphael Grandjean, Thomas Kiefer, Jonas Grossenbacher, Rosario Maurizio Gullo

This paper describes the fabrication of sub micrometer silicon oxycarbide (SiCO) ceramic structures. The method consists in replicating silicon micro/nanostructures in polydimethylsiloxane (PDMS), followed by a micro/nano molding of liquid polymer derived ...

Elsevier2012