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Vaida Auzelyte

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Related publications (11)

Please note that this is not a complete list of this person’s publications. It includes only semantically relevant works. For a full list, please refer to Infoscience.

One-step fabrication of high refractive index inorganic nanostructures

Direct printing of spin-on functional films is probably the most efficient method to develop low-cost novel photonic nanodevices, such as diffraction gratings, planar waveguides, nano- lasers, and antireflective coatings. For these applications high refrac ...

2023

Direct imprinting of organic-inorganic hybrid materials into high aspect ratio sub-100 nm structures

Jürgen Brugger, Thomas Kiefer, Victor Javier Cadarso Busto, Vaida Auzelyte

The challenging fabrication of sub-100-nm structures with high aspect ratio by UV-nanoimprint lithography (NIL) is addressed in this work. Thermal shrinkage is induced by cooling the structures below room temperature to avoid the issues commonly arising du ...

Springer Verlag2014

High aspect ratio etching of nanopores in PECVD SiC through AAO mask

Jürgen Brugger, Vaida Auzelyte, Songmei Wu, Wei Tang

We present in this work the fabrication of high aspect ratio nanopores in 500 nm PECVD SiC films through AAO (anodic aluminum oxide) mask. The initial AAO thin film is 180 nm thick and the diameter of nanopores is 33 ± 7 nm. We have used three plasma chemi ...

IEEE2013