Publications by Vaida Auzelyte

One-step fabrication of high refractive index inorganic nanostructures

Direct printing of spin-on functional films is probably the most efficient method to develop low-cost novel photonic nanodevices, such as diffraction gratings, planar waveguides, nano- lasers, and antireflective coatings. For these applications high refrac ...

2023

Direct imprinting of organic-inorganic hybrid materials into high aspect ratio sub-100 nm structures

Jürgen Brugger, Thomas Kiefer, Victor Javier Cadarso Busto, Vaida Auzelyte

The challenging fabrication of sub-100-nm structures with high aspect ratio by UV-nanoimprint lithography (NIL) is addressed in this work. Thermal shrinkage is induced by cooling the structures below room temperature to avoid the issues commonly arising du ...

Springer Verlag2014

High aspect ratio etching of nanopores in PECVD SiC through AAO mask

Jürgen Brugger, Vaida Auzelyte, Songmei Wu, Wei Tang

We present in this work the fabrication of high aspect ratio nanopores in 500 nm PECVD SiC films through AAO (anodic aluminum oxide) mask. The initial AAO thin film is 180 nm thick and the diameter of nanopores is 33 ± 7 nm. We have used three plasma chemi ...

IEEE2013

Large-Area Gold/Parylene Plasmonic Nanostructures Fabricated by Direct Nanocutting

Christian Santschi, Jürgen Brugger, Olivier Martin, Benjamin Gallinet, Valentin Flauraud, Shourya Dutta Gupta, Vaida Auzelyte

Wiley-V C H Verlag Gmbh2013

Phenyl-bridged polysilsesquioxane positive and negative resist for electron beam lithography

Jürgen Brugger, Vaida Auzelyte

We present and characterize an organic–inorganic hybrid sol–gel material, phenyl-bridged polysilsesquioxane (ph-PSQ), for use as a new highresolution resist for electron beam lithography (EBL). The resist has a unique characteristic as the only positive to ...

Institute of Physics2012

Heterogeneous material micro-transfer by ink-jet print assisted mould filling

Jürgen Brugger, Loïc Jacot-Descombes, Grégoire Maxime Smolik, Victor Javier Cadarso Busto, Vaida Auzelyte

A novel combination of ink-jet printing (IJP) and micro-transfer moulding (μ-TM) for high-resolution, heterogeneous material microstructuring is demonstrated. First, IJP is used to accurately fill the micro-cavities in an elastomeric mould, thus avoiding t ...

Elsevier2012

Highly inorganic titania based sol–gel as directly patternable resist for micro- and nano- structured surfaces

Jürgen Brugger, Vaida Auzelyte, Agnese Virginia Savegnago

Highly inorganic sol–gel films and patterned surfaces with up to 90% of titania were obtained by hydrolysis and condensation of Titanium(IV) isopropoxide. As a consequence of titania photocatalytic effect, the further treatment of the nanoimprint patterned ...

Elsevier2012

Biomimetic soft lithography on curved nanostructured surfaces

Jürgen Brugger, Thomas Kiefer, Valentin Flauraud, Victor Javier Cadarso Busto, Vaida Auzelyte

In this paper a nano-molding process using a nature-created master is demonstrated. The eye of night moth Agotis exclamationis having 100 nm-scale structures on a curved surface is used as biomimetic master mold from which nanostructures are replicated ont ...

Elsevier2012

Solid-state Nanopore Array Membranes Patterned by Electron Beam Lithography, Nanosphere Lithography and Aluminum Anodization

Jürgen Brugger, Nicolas Blondiaux, Oscar Vazquez Mena, Andreea Veronica Savu, Mona Julia Katharina Klein, Franck Montagne, Vaida Auzelyte, Songmei Wu

We present the fabrication of thin membranes with dense arrays of nanometer and submicrometer pore arrays by the integration of standard micromachining with three pore patterning techniques: electron beam lithography (EBL), nanosphere lithography (NSL) and ...

Research Publishing Services2011

Solid-state nanopore array membranes patterned by electron beam lithography, nanosphere lithography and aluminum anodization

Jürgen Brugger, Nicolas Blondiaux, Harry Heinzelmann, Oscar Vazquez Mena, Andreea Veronica Savu, Mona Julia Katharina Klein, Raphaël Pugin, Franck Montagne, Vaida Auzelyte, Songmei Wu

We present the fabrication of thin membranes with dense arrays of nanometer and submicrometer pore arrays by the integration of standard micromachining with three pore patterning techniques: electron beam lithography (EBL), nanosphere lithography (NSL) and ...

2011

High-density, high-aspect ratio epoxy microstructures by Direct Write Laser Patterning

Georges-André Racine, Jürgen Brugger, Jean-Baptiste Bureau, Victor Javier Cadarso Busto, Vaida Auzelyte

2010