Publications by Annalisa De Pastina

Silicon microresonator arrays: A comprehensive study on fabrication techniques and pH-controlled stress-induced variations in cantilever stiffness

Luis Guillermo Villanueva Torrijo, Annalisa De Pastina

We introduce a detailed design and fabrication process of Silicon microcantilever arrays for biomolecular detection in liquid environment, utilized with laser readout. We present typical fabrication problems and provide related solutions to obtain high qua ...

Elsevier2024

Avoiding transduction-induced heating in suspended microchannel resonators using piezoelectricity

Luis Guillermo Villanueva Torrijo, Damien Maillard, Annalisa De Pastina, Amir Musa Abazari

Calorimetry of single biological entities remains elusive. Suspended microchannel resonators (SMRs) offer excellent performance for real-time detection of various analytes and could hold the key to unlocking pico-calorimetry experiments. However, the typic ...

SPRINGERNATURE2021

Suspended micro/nano channel resonators: a review

Luis Guillermo Villanueva Torrijo, Annalisa De Pastina

Micro- and nano-electromechanical systems (M/NEMS) have demonstrated outstanding sensing capabilities down to the yoctogram (10(-24) g) scale in vacuum environment and cryogenic temperatures. In order to bring such extraordinary resolution levels into the ...

2020

Fabrication of clamped-clamped beam resonators with embedded fluidic nanochannel

Philippe Renaud, Stefano Silvio Giovanni Varricchio, Luis Guillermo Villanueva Torrijo, Stefano Stassi, Damien Maillard, Annalisa De Pastina, Davide Scaiola, Carlo Ricciardi

Suspended nanochannel resonators (SNRs) are promising devices able to characterize mass down to the attogram scale, thus being able to detect nanoparticles or biomolecules. In this paper, we present a flexible fabrication process for SNRs based on a sacrif ...

ELSEVIER2020

Modular interface and experimental setup for in-vacuum operation of microfluidic devices

Luis Guillermo Villanueva Torrijo, Damien Maillard, Annalisa De Pastina, Tom Larsen

We report on the design and operation of a world-to-chip microfluidic interface and experimental setup for fluidic micro- and nano-electromechanical systems. The central component of the interface is an engineered polyether ether ketone connector that brin ...

2019

Engineered acoustic mismatch for anchor loss control in contour mode resonators

Luis Guillermo Villanueva Torrijo, Annalisa De Pastina, Andrea Lozzi

Improving the quality factor (Q) of electromechanical resonators is of paramount importance for different applications, ranging from RF filtering to sensing. In this paper, we present a modified fabrication process flow for contour mode resonators to simul ...

2019

Laterally excited bulk wave resonators (XBARs) based on thin Lithium Niobate platelet for 5GHz and 13 GHz filters

Victor Plessky, Luis Guillermo Villanueva Torrijo, Annalisa De Pastina, Soumya Yandrapalli, Muhammad Faizan

In a free ZY-LiNbO3 400nm thick platelet, narrow electrodes (500nm wide) placed periodically with a pitch of few micrometers can eXcite standing Bulk Acoustic shear wave Resonances (XBARs), by means of lateral electric field parallel to crystalline Y- axis ...

IEEE2019

Effect of AlN seed layer on crystallographic characterization of piezoelectric AlN

Paul Muralt, Luis Guillermo Villanueva Torrijo, Ramin Matloub Aghdam, Waqas Bashir, Annalisa De Pastina, Kaitlin Marie Howell

Ultrathin aluminum nitride (AlN) films are of great interest for integration into nanoelectromechanical systems for actuation and sensing. Given the direct relationship between crystallographic texture and piezoelectric (PZE) response, x-ray diffraction ha ...

2019

Fabrication Of Lithium Niobate Bulk Acoustic Resonator For 5G Filters

Victor Plessky, Luis Guillermo Villanueva Torrijo, Annalisa De Pastina, Soumya Yandrapalli, Muhammad Faizan

This work presents the fabrication of a MEMS resonant device which addresses the need for high quality and miniaturized RF filters in the 3-6 GHz range for 5th generation (5G) mobile networks. The 4-mask fabrication process is based on the definition of in ...

IEEE2019

PZE-transduced Suspended Microchannel Resonators for sensing applications

Annalisa De Pastina

This PhD thesis aims at developing a system which can measure the mechanical properties of fluidic samples in the picoliter range. The ultimate goal is the characterization of cancer cells and viscoelastic fluids (i.e. biological fluids), in order to study ...

EPFL2018

Fabrication of suspended microchannel resonators with integrated piezoelectric transduction

Luis Guillermo Villanueva Torrijo, Damien Maillard, Annalisa De Pastina

2018

Release area confinement in Contour Mode Resonators

Luis Guillermo Villanueva Torrijo, Annalisa De Pastina, Andrea Lozzi

In this paper we propose a modified fabrication process to finely define the region surrounding the resonator that undergoes Si etching in CMRs. The unpredictable undercut has been shown to lead to Q instability within microns' variation. High aspect ratio ...

Ieee2017

Piezoelectric Nanoelectromechanical Systems

Luis Guillermo Villanueva Torrijo, Annalisa De Pastina, Kaitlin Marie Howell, Andrea Lozzi, Tom Larsen, Muhammad Faizan

In this paper we describe five different transduction techniques for the motion of NEMS resonators. We describe how these techniques differ from those used for MEMS and how centrosymmetric or amorphous materials can be used to fabricate NEMS. ...

2017