Publication

Effect of filler behavior on nanocomposite SU8 photoresist for moving micro- parts

Philippe Renaud, Arnaud Bertsch, Stefano Mischler, Sébastien Jiguet
2006
Journal Articles

Abstract

The use of low-stress SU8 nanocomposites as a functional material for micro- parts and coating applications is described in this paper. It was found that the nanoparticles lower the internal stress and decrease the wear rate and frictional coefficient of the SU8 epoxy. The applicability of this technology is demonstrated on gear wheels configuration and coating multilayer capping technology on moving micro-parts

Official source

https://infoscience.epfl.ch/entities/publication/ab4b806d-06d8-4d27-a960-7af63bcdb7f7

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Philippe Renaud, Arnaud Bertsch, Stefano Mischler, Sébastien Jiguet
2006
Journal Articles

Abstract

Official source

https://infoscience.epfl.ch/entities/publication/ab4b806d-06d8-4d27-a960-7af63bcdb7f7

About this result

Related concepts (32)

Nanoparticle

A nanoparticle or ultrafine particle is usually defined as a particle of matter that is between 1 and 100 nanometres (nm) in diameter. The term is sometimes used for larger particles, up to 500 nm, or fibers and tubes that are less than 100 nm in only two directions. At the lowest range, metal particles smaller than 1 nm are usually called atom clusters instead.

Gear

A gear is a rotating circular machine part having cut teeth or, in the case of a cogwheel or gearwheel, inserted teeth (called cogs), which mesh with another (compatible) toothed part to transmit (convert) torque and speed. The basic principle behind the operation of gears is analogous to the basic principle of levers. A gear may also be known informally as a cog. Geared devices can change the speed, torque, and direction of a power source.

MEMS

MEMS (Microelectromechanical systems) is the technology of microscopic devices incorporating both electronic and moving parts. MEMS are made up of components between 1 and 100 micrometres in size (i.e., 0.001 to 0.1 mm), and MEMS devices generally range in size from 20 micrometres to a millimetre (i.e., 0.02 to 1.0 mm), although components arranged in arrays (e.g., digital micromirror devices) can be more than 1000 mm2.

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