Publications de Hansu Birol | EPFL Graph Search

Application of graphite-based sacrificial layers for fabrication of LTCC (low temperature co-fired ceramic) membranes and micro-channels

Fabrication of sensors and micro-fluidic structures from low temperature co- fired ceramic (LTCC) sheets is a growing interest in the micro-packaging community. Such devices usually have inner cavities, whose production is quite complicated. The most elega ...

Institute of Physics2007

Fabrication of a Millinewton Force Sensor Using Low Temperature Co-fired Ceramic (LTCC) Technology

Thomas Maeder, Peter Ryser, Hansu Birol, Ingo Nadzeyka

This study is aimed at outlining the fabrication of a novel piezoresistive force sensor using LTCC technology, which operates at millinewton range, yet is compatible with low cost thick-film fabrication process. Mechanical and electrical characterization o ...

Elsevier2007

Fabrication of low temperature co-fired ceramic (LTCC)-based sensor and micro-fluidic structures

Hansu Birol

Low temperature co-fired ceramic (LTCC) technology has attracted remarkable attention in fabrication of sensors and micro-fluidic devices in the last decade. Although structuring planar LTCC foils, which are processed and screen-printed with thick-films, s ...

EPFL2007

Preparation and Characterization of (K0.5, Na0.5)NbO3 Ceramics

Dragan Damjanovic, Nava Setter, Hansu Birol

In this paper the preparation and characterization of the ceramic material (K0.5Na0.5)NbO3 (KNN) has been studied. Although conventional processing of KNN is often reported to result in sintered bodies lacking sufficient density, samples produced in this w ...

2006

Processing of Graphite-Based Sacrificial Layer for Microfabrication of Low Temperature Co-fired Ceramics (LTCC)

Thomas Maeder, Peter Ryser, Hansu Birol

The processing and application of graphite powder-based sacrificial layer for fabrication of microfluidic structures in LTCC is described. Such layers are produced as pastes, which are screen-printed in LTCC sheets to avoid sagging, by supporting closed, t ...

2006

Modification of Thick-film Conductors Used in IP Technology for Reduction of Warpage during Co-firing of LTCC (Low Temperature Co-fired Ceramic) Modules

Thomas Maeder, Peter Ryser, Hansu Birol

LTCC technology offers low temperature firing (

Trans Tech Publications2006

Influence of processing and conduction materials on properties of co-fired resistors in LTCC structures

Thomas Maeder, Peter Ryser, Hansu Birol

The motivation of this study is the need for fundamental understanding of the effects of processing conditions on the electrical properties of low- temperature co-fired ceramic (LTCC) tapes, those screen printed with commercial thick-film pastes of electro ...

2006

Structuration and Fabrication of Sensors Based on LTCC (Low Temperature Co-fired Ceramic) Technology

Thomas Maeder, Peter Ryser, Giancarlo Corradini, Hansu Birol, Caroline Jacq

The purpose of this paper is to demonstrate sensors and structures fabricated using the LTCC technology, which has been addressed and employed increasingly as a smart packaging approach for several applications. The focus will be on inclination and cantile ...

Trans Tech Publications2006

Design and processing of low-range piezoresistive LTCC force sensors

Thomas Maeder, Peter Ryser, Giancarlo Corradini, Hansu Birol

Low-temperature cofired ceramic (LTCC) combines many advantageous features for low-range (force & pressure) piezoresistive sensors: ease of 3D structuration, availability of very thin sheets, low elastic modulus and yet reasonable mechanical strength. This ...

2005

Fabrication of low-temperature co-fired ceramics micro-fluidic devices using sacrificial carbon layers

Thomas Maeder, Peter Ryser, Sigfrid Straessler, Hansu Birol, Caroline Jacq

Ease of fabrication and design flexibility are two attractive features of low temperature co-fired ceramics (LTCC) technology for fabrication of complex micro-fluidic devices. Such structures are designed and processed using different shaping methods, the ...

2005

Low temperature co-fired ceramic (LTCC) technology: general processing aspects and fabrication of 3-D structures for micro-fluidic devices

Thomas Maeder, Peter Ryser, Hansu Birol

LTCC technology is based on sintering of multi-layered thick-film sheets (50-250 µm) or so-called green tapes, which are screen-printed with thick-film pastes such as conductors, resistors, etc. The terms low temperature and co-fired originate from the rel ...

2005

Milinewton force sensor based on low temperature co-fired ceramic (LTCC) technology

Thomas Maeder, Peter Ryser, Giancarlo Corradini, Hansu Birol, Caroline Jacq

Fabrication of a millinewton force sensor, which is based on LTCC technology as an alternative to the widely used alumina (Al2O3) is described. The new sensor, integrated with piezoresistor thick-film, has shown an increase in the sensitivity by two times ...

2005

Investigation of Interactions Between Co-fired LTCC Components

Thomas Maeder, Peter Ryser, Hansu Birol, Caroline Jacq

In spite of many advantages it offers for micro-electronic packaging, the low temperature co-fired ceramic (LTCC) technology has yet certain issues to be solved. Physical and chemical reactions, for instance, within and between the passive electronic compo ...

2005