Publications de Mustafa Yilmaz

Nanomechanical Modeling of the Bending Response of Silicon Nanowires

Yusuf Leblebici, Zuhal Tasdemir, Mustafa Yilmaz, Mohammad Nasr Esfahani

Understanding the mechanical behavior of silicon nanowiresis essentialfor the implementation of advanced nanoscale devices. Although bendingtests are predominantly used for this purpose, their findings shouldbe properly interpreted through modeling. Variou ...

AMER CHEMICAL SOC2023

A new characterization approach to study the mechanical behavior of silicon nanowires

Yusuf Leblebici, Zuhal Tasdemir, Mustafa Yilmaz, Mohammad Nasr Esfahani

This work proposes a new approach to characterize the mechanical properties of nanowires based on a combination of nanomechanical measurements and models. Silicon nanowires with a critical dimension of 90 nm and a length of 8 mu m obtained through a monoli ...

SPRINGER HEIDELBERG2021

Monolithic technology for silicon nanowires in high-topography architectures

Yusuf Leblebici, Mustafa Yilmaz, Mohammad Nasr Esfahani

Integration of silicon nanowires (Si NWs) in three-dimensional (3D) devices including integrated circuits (ICs) and microelectromechanical systems (MEMS) leads to enhanced functionality and performance in diverse applications. The immediate challenge to th ...

Elsevier2017

Superplastic behavior of silica nanowires obtained by direct patterning of silsesquioxane-based precursors

Yusuf Leblebici, Mustafa Yilmaz, Mohammad Nasr Esfahani

Silica nanowires spanning 10 μm-deep trenches are fabricated from different types of silsesquioxane-based precursors by direct e-beam patterning on silicon followed by release through deep reactive ion etching. Nanowire aspect ratios as large as 150 are ac ...

Institute of Physics2017

Top-Down Technique for Scaling toNnano in Silicon MEMS

Yusuf Leblebici, Zuhal Tasdemir, Yasin Kilinc, Mustafa Yilmaz

Nanoscale building blocks impart added functionalities to microelectromechanical systems (MEMS). The integration of silicon nanowires with MEMS-based sensors leading to miniaturization with improved sensitivity and higher noise immunity is one example high ...

American Vacuum Society2017

On heat transfer at microscale with implications for microactuator design

Yusuf Leblebici, Michail Zervas, Özgür Özsun, Mustafa Yilmaz

The dominance of conduction and the negligible effect of gravity, and hence free convection, are verified in the case of microscale heat sources surrounded by air at atmospheric pressure. A list of temperature-dependent heat transfer coefficients is provid ...

Institute of Physics2009

Monolithic Integration of Silicon Nanowires With a Microgripper

Yusuf Leblebici, Michail Zervas, Özgür Özsun, Izzet Yildiz, Mustafa Yilmaz

Si nanowire (NW) stacks are fabricated by utilizing the scalloping effect of inductively coupled plasma deep reactive ion etching. When two etch windows are brought close enough, scallops from both sides will ideally meet along the dividing centerline of t ...

Institute of Electrical and Electronics Engineers2009