Publications de Teodoro Graziosi

Method for flattening substrates or layers using 3d printing and etching

Niels Quack, Nathanaël Restori, Marcell Kristof Kiss, Teodoro Graziosi

The present invention concerns a layer or substrate flattening method comprising the steps of: - providing a layer or substrate (1) to be flattened; - measuring a topography or surface profile of at least one area (3) of the layer or substrate to be flatte ...

2021

Integrated photonic devices in single crystal diamond

Niels Quack, Marcell Kristof Kiss, Teodoro Graziosi, Sichen Mi

The field of diamond photonics is reviewed, with a focus on recent experimental demonstrations of photonic integrated devices in a single crystal diamond. This field leverages the outstanding material properties of diamond with the aim to establish large-s ...

2020

Non-contact polishing of a crystalline layer or substrate by ion beam etching

Niels Quack, Teodoro Graziosi, Sichen Mi

Polishing method comprising the steps of: - providing at least one crystalline layer or substrate, the at least one crystalline layer or substrate extending in at least one plane, and including at least one outer surface and at least one depression extendi ...

2020

Reactive ion etching of single crystal diamond by inductively coupled plasma: State of the art and catalog of recipes

Niels Quack, Pascal Gallo, Marcell Kristof Kiss, Teodoro Graziosi, Sichen Mi, Mehdi Naamoun

2020

Non-contact polishing of single crystal diamond by ion beam etching

Niels Quack, Teodoro Graziosi, Sichen Mi

We propose a non-contact surface finishing method for brittle substrates by ion beam etching and we experimentally demonstrate polishing of (100) single crystal diamond surface. We model and simulate the polishing process, and verify the results experiment ...

2019

Single crystalline diamond diffractive optical elements and method of fabricating the same

Niels Quack, Marcell Kristof Kiss, Teodoro Graziosi

The present invention concerns a single crystalline diamond optical element production method. The method includes the steps of: ‐ providing a single crystalline diamond substrate or layer; ‐ applying a mask layer to the single crystalline diamond substrat ...

2019

Fabrication and Characterization of Freestanding Single Crystal Diamond and Silicon Microresonators

Teodoro Graziosi

Microresonators are fundamental building blocks of any photonic integrated circuit, as they can be used as filters, modulators, sensors, and to enhance light emission. If these resonators are suspended and are free to oscillate, we can exploit the interact ...

EPFL2019

Single crystalline diamond part production method for stand alone single crystalline mechanical and optical component production

Niels Quack, Pascal Gallo, Marcell Kristof Kiss, Teodoro Graziosi

The present invention relates to a free-standing single crystalline diamond part and a single crystalline diamond part production method. The method includes the steps of: - providing a single crystalline diamond substrate or layer; - providing a first adh ...

2019

High-quality single crystal diamond diffraction gratings fabricated by crystallographic etching

Christian Santschi, Niels Quack, Olivier Martin, Toralf Scharf, Marcell Kristof Kiss, Teodoro Graziosi

We demonstrate a novel method for fabricating single crystal diamond diffraction gratings based on crystallographic etching that yields high-quality diffraction gratings from commercially available diamond plates. Both V-groove and rectangular gratin ...

2019

Silicon Photonic MEMS Phase-Shifter

Niels Quack, Marcell Kristof Kiss, Teodoro Graziosi, Hamed Sattari

We present a design for an analog phase shifter based on Silicon Photonic MEMS technology. The operation principle is based on a two-step parallel plate electrostatic actuation mechanism to bring a vertically movable suspended tapered waveguide in a first ...

2019

Freestanding optical micro-disk resonators in single-crystal diamond by reactive ion etching and multidirectional focused ion-beam milling

Niels Quack, Teodoro Graziosi, Sichen Mi

2018

Precision micro-mechanical components in single crystal diamond by deep reactive ion etching

Niels Quack, Teodoro Graziosi, Hamed Sattari

Nature Publishing Group2018

Trapezoidal Diffraction Grating Beam Splitters in Single Crystal Diamond

Niels Quack, Teodoro Graziosi

2018

Single crystal diamond micro-disk resonators by focused ion beam milling

Niels Quack, Marcell Kristof Kiss, Teodoro Graziosi, Sichen Mi

We report on single crystal diamond micro-disk resonators fabricated in bulk chemical vapor deposition diamond plates (3 mm x 3 mm x 0.15 mm) using a combination of deep reactive ion etching and Focused Ion Beam (FIB) milling. The resulting structures are ...

2018

Silicon photonic MEMS variable optical attenuator

Niels Quack, Teodoro Graziosi, Hamed Sattari

We present a design for an on-chip MEMS-actuated Variable Optical Attenuator (VOA) based on Silicon Photonic MEMS technology. The VOA consists of 30 individual mechanically movable MEMS cantilevers, suspended over an integrated, 1 mu m wide bus waveguide, ...

SPIE-INT SOC OPTICAL ENGINEERING2018

Enhancement of optical quality factor by thermal annealing of single crystal diamond micro-resonators

Niels Quack, Marcell Kristof Kiss, Teodoro Graziosi, Sichen Mi

We report on the increase in optical quality factor of a suspended single crystal diamond micro-disk resonator by thermal annealing. The resonators are fabricated by Deep Reactive Ion Etching (DRIE) to obtain circular pillars in bulk single crystal diamond ...

IEEE2018

Die Level Release of Silicon Photonic MEMS

Niels Quack, Jonas Jacobs, Teodoro Graziosi

We demonstrate a die level release process for silicon photonic MEMS structures, that is compatible with dies from a standard silicon photonics foundry process which are only several square millimeters in size. ...

IEEE2016