Publications de Muhammad Faizan

Thin Film Devices For 5G Communications

Luis Guillermo Villanueva Torrijo, Damien Maillard, Seniz Esra Küçük, Soumya Yandrapalli, Muhammad Faizan, Marco Liffredo

Piezoelectric-based resonators are some of the most used devices in the world. Invisible to most people, they constitute key elements for your mobile phone communications. With the advent of 50, the current technologies for piezoelectric resonators need to ...

IEEE2021

Development of Lamb wave resonators in thin film X-cut lithium niobate

Muhammad Faizan

Microelectromechanical systems (MEMS) is among the most revolutionary technologies of 21st century, with the applications ranging from industrial systems to consumer electronics. Using MEMS in battery-powered wireless devices has long been seen as the evol ...

EPFL2021

Frequency-scalable fabrication process flow for lithium niobate based Lamb wave resonators

Luis Guillermo Villanueva Torrijo, Muhammad Faizan

In this paper, we demonstrate the fabrication and characterization of lithium niobate (LN) based Lamb wave mode (S0 and SH0) resonators that address the stringent requirements of RF filtering for modern communication systems. The devices consist of a 400 n ...

IOP PUBLISHING LTD2020

Acoustic Actuation Of Suspended Graphene For Linear Excitation Of 2D Nems

Luis Guillermo Villanueva Torrijo, Muhammad Faizan, Marsha Mary Parmar

In this paper, we present the fabrication of on-chip piezoelectric acoustic actuation for 2D materials. Acoustic actuation is achieved at device level through patterning of aluminum nitride (AlN) thin film at wafer scale. Two piezoelectric stacks consistin ...

IEEE2019

Laterally excited bulk wave resonators (XBARs) based on thin Lithium Niobate platelet for 5GHz and 13 GHz filters

Victor Plessky, Luis Guillermo Villanueva Torrijo, Annalisa De Pastina, Soumya Yandrapalli, Muhammad Faizan

In a free ZY-LiNbO3 400nm thick platelet, narrow electrodes (500nm wide) placed periodically with a pitch of few micrometers can eXcite standing Bulk Acoustic shear wave Resonances (XBARs), by means of lateral electric field parallel to crystalline Y- axis ...

IEEE2019

Fabrication Of Lithium Niobate Bulk Acoustic Resonator For 5G Filters

Victor Plessky, Luis Guillermo Villanueva Torrijo, Annalisa De Pastina, Soumya Yandrapalli, Muhammad Faizan

This work presents the fabrication of a MEMS resonant device which addresses the need for high quality and miniaturized RF filters in the 3-6 GHz range for 5th generation (5G) mobile networks. The 4-mask fabrication process is based on the definition of in ...

IEEE2019

Piezoelectric Nanoelectromechanical Systems

Luis Guillermo Villanueva Torrijo, Annalisa De Pastina, Kaitlin Marie Howell, Andrea Lozzi, Tom Larsen, Muhammad Faizan

In this paper we describe five different transduction techniques for the motion of NEMS resonators. We describe how these techniques differ from those used for MEMS and how centrosymmetric or amorphous materials can be used to fabricate NEMS. ...

2017