Publications de Berke Erbas | EPFL Graph Search

Combination of Thermal Scanning Probe Lithography and Directed Self-Assembly of Block Copolymers

Arnaud Bertsch, Jürgen Brugger, Berke Erbas

The fabrication of semiconductor quantum devices necessitates sub-20 nm features and high-density patterning, often exceeding the capabilities of current state-of-the-art lithographic techniques. To address this challenge, in this work, the combination of ...

SPIE2025

Beyond the Mask: Advancing Fabrication and Immersive Learning

Arnaud Bertsch, Jürgen Brugger, Berke Erbas, Jongeon Park, Chenxiang Zhang

This paper presents advances in micro and nanofabrication techniques beyond conventional lithographic masks with examples of inkj et printing, nanostencil lithography, molecular-level doping methods, and thermal scanning probe lithography. These methods en ...

IEEE2025

Grayscale nanopatterning for strain-engineered 2D materials

Berke Erbas

Semiconductor innovation is shifting from traditional dimensional scaling toward novel architectures and materials as lithography nears its physical limits. FinFETs and GAAFETs have marked key milestones, with scaling now progressing through 3D stacking. M ...

EPFL2025

Deterministic grayscale nanotopography to engineer mobilities in strained MoS2 FETs

Giovanni Boero, Andras Kis, Jürgen Brugger, Georg Fantner, Nicola Marzari, Norma Rivano, Zhenyu Wang, Xia Liu, Ana Conde Rubio, Berke Erbas, Mitali Banerjee, Jin Jiang, Marcos Penedo Garcia

Field-effect transistors (FETs) based on two-dimensional materials (2DMs) with atomically thin channels have emerged as a promising platform for beyond-silicon electronics. However, low carrier mobility in 2DM transistors driven by phonon scattering remain ...

Nature Research2024

Combining thermal scanning probe lithography and dry etching for grayscale nanopattern amplification

Giovanni Boero, Arnaud Bertsch, Andras Kis, Jürgen Brugger, Georg Fantner, Zhenyu Wang, Xia Liu, Ana Conde Rubio, Berke Erbas, Mitali Banerjee, Marcos Penedo Garcia

Grayscale structured surfaces with nanometer-scale features are used in a growing number of applications in optics and fluidics. Thermal scanning probe lithography achieves a lateral resolution below 10 nm and a vertical resolution below 1 nm, but its maxi ...

Springernature2024