Fonderie (électronique)

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Publications associées (27)

Fabrication of structured anode-supported solid oxide fuel cell by powder injection molding

Jan Van Herle, Antonin Faes, Zacharie Wuillemin, Amédée Zryd

Powder Injection Molding (PIM) gives the possibility to produce, at an industrial rate, ceramic parts with fine details. It is thus a possible approach to reduce the fabrication costs of Solid Oxide Fuel Cells (SOFCs). This work presents fabrication and el ...

2013

Compliant membranes improve resolution in full-wafer micro/nanostencil lithography

Jürgen Brugger, Luis Guillermo Villanueva Torrijo, Andreea Veronica Savu, Oscar Vazquez Mena, Katrin Sidler Arnet

This work reports on a considerable resolution improvement of micro/nanostencil lithography when applied on full-wafer scale by using compliant membranes to reduce gap-induced pattern blurring. Silicon nitride (SiN) membranes are mechanically decoupled fro ...

2012

The electron–hole bilayer tunnel FET

Mihai Adrian Ionescu, Luca De Michielis, Livio Lattanzio

We propose a novel tunnel field-effect transistor (TFET) concept called the electron–hole bilayer TFET (EHBTFET). This device exploits the carrier tunneling through a bias-induced electron–hole bilayer in order to achieve improved switching and higher driv ...

Elsevier2012

Top-down fabrication of very-high density vertically stacked silicon nanowire arrays with low temperature budget

Giovanni De Micheli, Davide Sacchetto, Michail Zervas, Yusuf Leblebici

We report on a top-down complementary metal oxide semiconductor (CMOS) compatible fabrication method of ultra-high density Si nanowire (SiNW) arrays using a time multiplexed alternating process (TMAP) with low temperature budget. The flexibility of the fab ...

Elsevier2011

Inexpensive and fast wafer-scale fabrication of nanohole arrays in thin gold ﬁlms for plasmonics

Jürgen Brugger, Harry Heinzelmann, Mona Julia Katharina Klein, Bernard Wenger, Raphaël Pugin

In this paper, a fast and inexpensive wafer-scale process for the fabrication of arrays of nanoscale holes in thin gold ﬁlms for plasmonics is shown. The process combines nanosphere lithography using spin-coated polystyrene beads with a sputter-etching pro ...

Institute of Physics2010

Fast and robust hydrogen sensors based on discontinuous palladium films on polyimide, fabricated on a wafer scale

Jürgen Brugger, Luis Guillermo Villanueva Torrijo, Thomas Kiefer

Fast hydrogen sensors based on discontinuous palladium (Pd) ﬁlms on supporting polyimide layers, fabricated by a cost-efﬁcient and full-wafer compatible process, are presented. The ﬁlms, deposited by electron-beam evaporation with a nominal thickness of 1. ...

Institute of Physics2010

Silicon nanowire AFM tips grown on released scanning probe cantilevers from stencil-deposited catalysts

Jürgen Brugger, Andreea Veronica Savu

We present a parallel, full wafer technique for deposition of catalyst on released scanning probe bodies for the growth of individual high aspect-ratio Si nanowire tips. 1-D probes are necessary for imaging high aspect-ratio nano-patterns, such as deep and ...

2010

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